JPS6245320Y2 - - Google Patents
Info
- Publication number
- JPS6245320Y2 JPS6245320Y2 JP18773981U JP18773981U JPS6245320Y2 JP S6245320 Y2 JPS6245320 Y2 JP S6245320Y2 JP 18773981 U JP18773981 U JP 18773981U JP 18773981 U JP18773981 U JP 18773981U JP S6245320 Y2 JPS6245320 Y2 JP S6245320Y2
- Authority
- JP
- Japan
- Prior art keywords
- disk
- clamp piece
- turntable
- central portion
- clamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000002093 peripheral effect Effects 0.000 description 3
- 230000037431 insertion Effects 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 1
Landscapes
- Holding Or Fastening Of Disk On Rotational Shaft (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18773981U JPS5890587U (ja) | 1981-12-15 | 1981-12-15 | デイスク保持装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18773981U JPS5890587U (ja) | 1981-12-15 | 1981-12-15 | デイスク保持装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5890587U JPS5890587U (ja) | 1983-06-18 |
| JPS6245320Y2 true JPS6245320Y2 (en]) | 1987-12-03 |
Family
ID=29990801
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18773981U Granted JPS5890587U (ja) | 1981-12-15 | 1981-12-15 | デイスク保持装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5890587U (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102680914B1 (ko) | 2021-02-10 | 2024-07-02 | 글로벌웨어퍼스 재팬 가부시키가이샤 | 에피택셜 실리콘 웨이퍼에 있어서의 결함의 발생 예측 방법 및 에피택셜 실리콘 웨이퍼의 제조 방법 |
-
1981
- 1981-12-15 JP JP18773981U patent/JPS5890587U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5890587U (ja) | 1983-06-18 |
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